Past Event

Beyond Photolithography
The Promise of Nano-Imprint Lithography

Date: Thursday, September 16, 2004
Location: Frances C. Arrillaga Alumni Center, Stanford University

Archived Presentations

Event brochure

Anthony Waitz, Managing Partner, Quantum Insight
Dr. S. V. Sreenivasan, CTO, Molecular Imprints
John Pong, Director of Sales, Nanonex Inc.
Dr. Will Tong, Researcher, Quantum Science Research Group of HP Labs
Dr. Charles D. Schaper, Senior Research Scientist, Stanford University

The costs of a current generation (90nm) photolithography tools for building integrated circuits is now on the order of $25M. The cost of next generation generation lithography tools are expected to be even more as the equipment makers move to yet more exotic technologies. The semiconductor industry is searching for new ways to reliably and cheaply create sub-100 nm structures. The nanotech community is looking ways to create structures with substantially smaller features today.

Nano-imprint lithography offers a new paradigm for printing nanometer scale structures for diverse applications in areas ranging from life sciences to semi conductors. Join the leaders of innovation in nano imprint lithography from industry and academia to explore the promise and challenges of this burgeoning area.

Moderator

Anthony Waitz, Managing Partner, Quantum Insight, is one of the cofounders of the MIT · Stanford · UC Berkeley Nanotechnology Forum.

Panelists

Dr. S. V. Sreenivasan, CTO, Molecular Imprints, is one of the founders of the company and one of the inventors of the technology while a Professor of Mechanical Engineering at the University of Texas at Austin. S.V. is a recognized authority in the areas of robotics and nano-precision machines

John Pong, Director of Sales, Nanonex Inc. comes to Nanonex with 23 years of successful sales achievements in the field of Electron Beam Lithography through Leica Microsystems; and in the field of Electron Microscopy through Leica Microsystems (Cambridge Instruments), Philips Electronic Instruments and AMRAY (KLA-Tencor). His ability to promote new products and relentless pursuit of developing and winning new businesses has enabled him to establish market leadership in the product areas that he has been engaged in.

Dr. Will Tong, Researcher, Quantum Science Research Group of HP Labs, received his PhD in chemistry at UCLA in 1994. He was a postdoctoral scientist at Lawrence Berkeley Lab and an NSF International postdoctoral fellow in Italy, performing research on materials properties of semiconductors. Since then he has been involved in R&D of mask fabrication for EUV lithography and optical proximity correction. He is currently a researcher at HP Inkjet Printing Group assigned to the Quantum Science Research Group at HP Labs to lead nanoimprint R&D effort.

Dr. Charles D. Schaper, Senior Research Scientist, Stanford University, is the inventor of the MxL (Molecular Transfer Lithography) nano-printing and nano-imprinting strategies, and discovered PVA-based surface topography replication chemistry for the formation of water-dissolvable biodegradable templates that drive the MxL methods.


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